Evaluation of dielectric elastomers to develop materials suitable for actuation

Electroactive polymers based on dielectric elastomers are stretchable and compressible capacitors that can act as transducers between electrical and mechanical energies. Depending on the targeted application, soft actuators, sensors or mechanical-energy harvesters can be developed. Compared with conventional technologies, they present a promising combination of properties such as being soft, silent, light and miniaturizable. Most of the research on dielectric elastomer actuators has focused on obtaining the highest strain, either from technological solutions using commercially available materials or through the development of new materials. It is commonly accepted that a high electrical breakdown field, a low Young's modulus and a high dielectric constant are targets. However, the interdependency of these properties makes the evaluation and comparison of these materials complex. In addition, dielectric elastomers can suffer from electromechanical instability, which amplifies their complexity. The scope of this review is to tackle these difficulties. Thus, first, two physical parameters are introduced, one related to the energy converted by the dielectric elastomer and another to its electromechanical stability. These numbers are then used to compare dielectric elastomers according to a general and rational methodology considering their physicochemical and electromechanical properties. Based on this methodology, different families of commercially available dielectric elastomers are first analyzed. Then, different polymer modification methods are presented, and the resulting modified elastomers are screened. Finally, we conclude on the trends enabling the choice of the most suitable modification procedure to obtain the desired elastomer. From this review work, we would like to contribute to affording a quick identification method, including a graphic representation, to evaluate and develop the dielectric materials that are suitable for a desired actuator.

High Permittivity Silicones for Dielectric Elastomer Actuators

Simon Johannes Dünki

Many technical advances of modern society sprout from the creation of specially customized polymer materials exhibiting unique combinations of properties uncharted so far. Amid this plurality of highly versatile materials, the class of electroactive polymers (EAPs) bears the special ability to undergo large shape changes when exposed to electrical stimulation. Such materials offer new perspectives in automation, robotics and medicine. Especially the dielectric elastomer actuators (DEA) technology is considered as highly promising among EAPs due to the simple working principle and actuation characteristics similar to mammalian muscles. Despite great research efforts and remarkable progress in regard to materials and devices, the commercial breakthrough of the DEA technology is still outstanding. A major obstacle for their application is the high driving voltage needed to obtain a reasonable actuation. The development of tailored elastomers that overcome this deficiency is therefore a main research focus in academia and industry. The exceptional elastic and dielectric characteristics of silicones nominate them as an ideal vantage point to start this endeavor. Their low permittivity inherently decreases the actuation performance and should therefore be optimized with all other properties remaining unaffected. In the present work, dipoles were covalently attached to a siloxane backbone in order to increase the permittivity thereof and achieve a material with an enhanced actuation performance at low driving voltages for DEAs. The introduction of the polar groups to the polymer side chains was carried out via thiol-ene chemistry, which enabled a quantitative functionalization of the polymer backbone. Three different polar groups, nitrile, thioether and sulfones, were investigated and the corresponding functionalized polysiloxanes were prepared and characterized. Thorough dielectric, mechanical and electromechanical investigations were conducted on polysiloxane based elastomers with different content of nitrile groups. In addition, first results were obtained with thioethers and sulfones which are also promising candidates to enhance the permittivity of polysiloxanes. Most of the synthesized polysiloxanes show glass transition temperatures well below room temperature, an important prerequisite to ensure elastic properties. Polysiloxanes that carry a butylthioether moiety at every repeat unit doubled the permittivity of the elastomer. With the same amount of the nitrile or sulfone dipoles, a six respectively eight times higher permittivity as compared to regular siloxane is achieved. However, with enhanced dipole content also an increase of the electrical conductivity of the polymer was observed. A simple one-step process to prepare cross-linked polar silicone films was developed using UV light triggered thiol-ene addition. A strong correlation between the dipole content in the material and the resulting actuation strain was found. Finally, a polar silicone elastomer was prepared that showed up to 20.5% lateral strain under a field as low as 10.8 V/um. Compared to commercial silicone this corresponds to an effective voltage reduction by about 70%. Processing such materials in films the thickness of which is below 10 um would result in an actuator that can be driven below 100 V.

EPFL2017

Transient Elastomers with High Dielectric Permittivity for Actuators, Sensors, and Beyond

Holger Frauenrath, Yauhen Sheima

Dielectric elastomers (DEs) are key materials in actuators, sensors, energy harvesters, and stretchable electronics. These devices find applications in important emerging fields such as personalized medicine, renewable energy, and soft robotics. However, even after years of research, it is still a great challenge to achieve DEs with increased dielectric permittivity and fast recovery of initial shape when subjected to mechanical and electrical stress. Additionally, high dielectric permittivity elastomers that show reliable performance but disintegrate under normal environmental conditions are not known. Here, we show that polysiloxanes modified with amide groups give elastomers with a dielectric permittivity of 21, which is 7 times higher than regular silicone rubber, a strain at break that can reach 150%, and a mechanical loss factor tan delta below 0.05 at low frequencies. Actuators constructed from these elastomers respond to a low electric field of 6.2 V m(-1), giving reliable lateral actuation of 4% for more than 30 000 cycles at 5 Hz. One survived 450 000 cycles at 10 Hz and 3.6 V m(-1). The best actuator shows 10% lateral strain at 7.5 V m(-1). Capacitive sensors offer a more than a 6-fold increase in sensitivity compared to standard silicone elastomers. The disintegrated material can be re-cross-linked when heated to elevated temperatures. In the future, our material could be used as dielectric in transient actuators, sensors, security devices, and disposable electronic patches for health monitoring.

AMER CHEMICAL SOC2022

A new versatile hybrid MEMS technology for high sensitivity, fluid proof sensing applications.

Matthias Neuenschwander

The field of micro electromechanical systems (MEMS) evolved from the microelectronic industry and the technologies developed to fabricate integrated circuits. As a result, MEMS are commonly fabricated on silicon wafers. The development of MEMS has been driven by three main merits: miniaturisation, microelectronics integration, and parallel fabrication with high precision. Many operational properties scale well with smaller sizes. In addition, integrated electronic circuitry allows embedding MEMS with computing or networking capabilities, while parallel manufacturing enables the fabrication of many identical devices on a single wafer, reducing the unit cost. The main MEMS application is transducers which transform signals from one form of energy to another, and can be used for perception (sensors) or to produce actions (actuators). Silicon and other microelectronic materials like metals have enabled very high-performance MEMS transducers because these materials can be used for a range of very effective actuating and sensing principles.More recently, polymers have started to be used in MEMS because of their unique electrical, physical and chemical properties which include biocompatibility, viscoelasticity and mechanical shock tolerance. They are also much softer than silicon or metals, and they can be processed using many techniques that allow unique low-cost, batch-style fabrication and packaging. However, polymers have relatively low glass-transition and melting temperatures. As a result, the advantages of polymers cannot easily be combined with high-performance actuating and sensing elements as these are based on silicon technology and require high-temperature fabrication steps. Here, a hybrid-MEMS fabrication process is used to address this issue. The developed devices are based on a trilayer structure, where a thick polymer core is sandwiched between two hard thin films, while electronic layers are embedded within in a fluid-compatible way.The objective of this thesis is to turn hybrid-MEMS into a benchmark MEMS technology. This involves many different aspects. First, sensing and actuation elements are integrated into trilayer devices, and their performance is analysed. Then, some more unique possibilities offered by hybrid-MEMS are exploited. A way to fabricate electronics on multiple layers is developed, which allows different electronic features to be integrated in parallel. In addition, three-dimensional bulk features fabricated at several levels are demonstrated. This is possible because the hybrid-MEMS process is based on the bonding of multiple wafers.All these new fabrication features are demonstrated in atomic force microscopy (AFM) applications. Self-actuated trilayer AFM cantilevers with sharp silicon tips are used to boost imaging speeds in the off-resonance tapping (ORT) mode, thanks to an order of magnitude faster surface probing rates. Furthermore, fully integrated ORT imaging is demonstrated with self-actuated piezoresistive cantilevers. Next, trilayer cantilevers with shielded conductive tips are introduced for electrical AFM modes. Finally, ongoing research projects are touched upon, including approaches to fabricate hybrid-MEMS with single crystal silicon piezoresistors for improved sensitivity, and an analysis of reproducibility of fabricated trilayer cantilevers.