Optimization of the fabrication of buried electrodes for NEMS resonators

The aim of this project is to optimize the fabrication of buried lateral electrodes, with a piezolectric material sandwiched between two metal electrodes. Lateral electrodes have the advantage of allowing the applied electric field to be and to remain completely horizontal. The fabrication is difficult to achieve since fencing and redeposition must be avoided, whilst total lateral coverage must be accomplished. In fact, fencing and redeposition between the metal and the piezoelectric material would lead to nonfunctional electrodes. Moreover, partial lateral coverage would not allow to have an ohmic contact between the metal and the piezoelectric material, therefore would not allow the application of an electric field.