Fabrication of new generation particle detectors

This project presents a microfabrication method for new generation particle detectors. This microsystem is supposed to detect ionizing radiation such as alpha particles, beta particles, and gamma rays. This project aims to miniaturized the otherwise well known Geiger counter instrument used for detecting and measuring ionization radiation. This report will identify each step of the fabrication, from the silicon wafer to the finalised microsystem, while explaining the potential problems inside the cleanroom and what needs to be avoided in order to get a desired final product. The whole microfabrication process was carried out inside the CMi at EPFL throughout the semester.