Publication

Characterization of thin film stress for MEMS planarization

Publications associées (55)

Piezoelectric and elastic properties of Al0.60Sc0.40N thin films deposited on patterned metal electrodes

Luis Guillermo Villanueva Torrijo, Silvan Stettler, Marco Liffredo, Nan Xu, Federico Peretti

Sc-doped aluminum nitride (AlScN) allows for piezoelectric devices with large electromechanical coupling and the benefits increase with larger Sc doping in the film. However, with a larger Sc concentration, the process window narrows, and it is necessary t ...

2024

Plasma-Assisted Hybrid Vapour Deposition Technology for Thin Film Fabrication

Caroline Hain

Continuous development of thin film deposition technologies is essential for the fabrication of films that meet the specific requirements of their target applications and working conditions. Therefore, it is necessary to increase the number of accessible a ...

EPFL2023

Deposition of Thin Alumina Films Containing 3D Ordered Network of Nanopores on Porous Substrates

Martina Lihter

Self-supporting thin films containing nanopores are very promising materials for use for multiple applications, especially in nanofiltration. Here, we present a method for the production of nanomembranes containing a 3D ordered network of nanopores in an a ...

2020

Atomic Control in Multicomponent Nanomaterials: when Colloidal Chemistry Meets Atomic Layer Deposition

Raffaella Buonsanti, Anna Loiudice, Ona Segura Lecina

In the past decades, atomically controlled multicomponent nanomaterials have served as platforms to advance the understanding of scientific phenomena along with providing practical solutions for various applications. Colloidal chemistry and atomic layer de ...

AMER CHEMICAL SOC2020

Method and system for fabricating glass-based nanostructures on large-area planar substrates, fibers, and textiles

Fabien Sorin, Alexis Gérald Page, Louis Marie Philippe Martin-Monier, Tapajyoti Dasgupta

A method for manufacturing glass-based micro- and nanostructure comprising the step of dewetting a thin-film glass layer on a textured substrate to form the micro- and nanostructure from the thin-film glass layer. ...

2020

Physical vapour deposition of cyanine salts and their first application in organic electronic devices

Frank Nüesch, Jakob Heier, Antonia Neels, Léo Duchêne, Donatas Gesevicius

A symmetrical trimethine indocyanine dye chromophore was modified with the bistriflylimide anion to study the changes in Coulomb interactions, thermal stability and the volatility of the organic salt. The bulky bistriflylimide anion minimizes electrostatic ...

2019

RF bias to suppress post-oxidation of mu c-Si:H films deposited by inductively-coupled plasma using a planar RF resonant antenna

Ivo Furno, Alan Howling, Philippe Frédérique Bruno Guittienne, Rémy Jacquier

One challenge for microcrystalline silicon (mu c-Si:H) deposition is to achieve high deposition rates while maintaining high quality films. In this work, an inductively-coupled plasma (ICP) is used to deposit mu c-Si:H on glass substrates by means of a nov ...

2018

Optimization of Sputter Deposition Process for Piezoelectric AlN Ultra-Thin Films

Kaitlin Marie Howell, Roman Welz

The sputtering conditions for the deposition of the layers underneath active AlN films were analyzed for improving the quality of the active AlN, and the dependence of AlN deposition temperature on crystalline quality was investigated, where a reduced depo ...

2017

Explaining Morphological and Electrical Features of Boron-doped Zinc Oxide to Tailor New Electrodes for Photovoltaics

Lorenzo Fanni

TCOs are a class of metal oxides that combine transparency to visible light with electrical conductivity. Each TCO is characterized by the trade-off of these two properties which can be tuned for a particular application. This thesis is dedicated to the in ...

EPFL2016

Comparison of amorphous silicon absorber materials: Kinetics of light-induced degradation

Christophe Ballif, Franz-Josef Haug, Matthieu Despeisse, Mathieu Gérard Boccard, Michael Elias Stückelberger, Yannick Samuel Riesen, Adrian Billet

We investigate the influence of the deposition parameters for intrinsic amorphous silicon absorber layers on light-induced degradation (LID) of thin-film silicon solar cells. The focus is on absorber layers with different bandgaps: on one side, solar cells ...

Wiley-Blackwell2016

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