Fully Reconfigurable Coupled-Resonator Optical Waveguides (CROWs) with 10 nW Static Power MEMS

We report on fully reconfigurable CROWs with MEMS-tunable waveguides. Resonatorto-resonator and resonator-to-waveguide coupling are fully tunable. Resonance of a resonator is also widely tunable to cover its full FSR. The static power consumption per tunable coupler is below 10nW. (C) 2021 The Author(s)