Orion MinAngle: A flexure-based, double-tilting parallel kinematics for ultra-high precision applications requiring high angles of rotation

If you need to design ultra-high precision devices for mechanisms with multiple axes there are not a lot of ways leading around flexure-based joints. Using this type of articulations totally eliminates backlash and friction and is, by this, providing an accurate mechanical foundation for your device. The most important disadvantage of this technology is the low range of motion. The basic joint types, blades and circular hinges, have angular limits which strongly depend on the targeted stiffness, the quantity of motion cycles and the elastic limit of the material. This article will introduce novel parallel kinematics which are totally based on 1 dof flexures and whose angular range of motion is determined by twice the range of the single joint. It is a 3 dof parallel kinematic based on 3 identical kinematic chains which produce movements in θx, θy and z. The model has been designed to constitute the left hand of a machine tool that requires orienting the workpiece in a very precise manner and with high rotation amplitudes. Additionally to this it presents very interesting characteristics of Remote-Center-of-Motion (RCM) mechanisms. This is a vital feature for applications where the linear movements are highly limited and should not be consumed by parasitic movements of other axes. All these features, combined with the advantages of parallel kinematics, make the Orion MinAngle a very interesting concept. The model has been designed with joints achieving ±7.6° leading to an output angle of ±15° on both rotation axes. The study has shown really promising results concerning the mechanical properties, the high rotation angles and the RCM capabilities. The paper presents the kinematics and its optimization method which is used to guarantee a nearly perfect division of the output angle on all pivots of the mechanism. The next chapters talk about the dimensioning of the flexible joints and generally about the design of the robot. The last part of the paper verifies the optimization trough kinematic modeling of the robot and computes the mechanical properties like stiffness, internal strains and mechanical Eigenfrequencies. At the end we propose a realistic application as a 5-axes parallel-kinematic machine tool and we come to a conclusion about the potential of the Orion MinAngle mechanism.

Concept of Modular Kinematics to Design Ultra-high Precision Parallel Robots

Murielle Richard

Miniaturisation will be the key challenge for the next decade in numerous industrial fields, such as microelectronics, optics and biomedical engineering. Although most of their products already achieve footprints of some square millimeters, the trend towards the integration of a maximum number of elements in a minimal volume requires even more compact components. This tendency creates a growing need for industrial robots able to perform micromanipulation and microassembly tasks with a submicrometric precision. Nonetheless, the design of such machines is nowadays costly, both in time and money, mostly because of the twofold complexity of their development: first, from a kinematic standpoint, the use of a parallel structure consists in a particularly interesting approach to build ultra-high precision robots. However, the synthesis of such a kinematics proves especially challenging for machines presenting more than 3 degrees of freedom. Moreover, the resulting robots are scarcely flexible: if the industrial specifications are modified, which for example necessitates to add a degree of freedom or to change the position of a rotation centre, the design process has to be restarted, often from the very beginning. The second challenge consists in the mechanical design of flexure-based mechanisms: flexure hinges are joints which are based on the elasticity of the matter. They allow to perform motions which are without friction, backlash and wear; their use is thus mandatory to achieve the aimed submicrometric precision. Albeit the synthesis of planar and low-degree of freedom structures is now widely investigated, the development of a whole tridimensional flexure-based robot is still infrequent, especially in the industrial context. This thesis thus introduces a modular design methodology which significantly reduces the time-to-market of ultra-high precision robots. This procedure can be compared to a robotic Lego, where a finite number of conceptual building bricks allows to easily design and modify parallel robots. Furthermore, this work shows that the machines resulting from this approach present similar or even improved performances compared to robots developed more traditionally. The key aspect of this thesis consists in the concept of modular kinematics, which aims at facilitating the synthesis of parallel kinematics thanks to solution catalogues. At this step of the methodology, the conceptual building bricks and the kinematics are totally independent from any mechanical design: they can thus be used to synthesise a large variety of robots, from machine-tools to microscale robots. An exhaustive conceptual solution catalogue groups all kinematics generated by the combination of the building bricks. Then, a reduced solution catalogue for ultra-high precision is proposed: based on selection criteria linked with the design and machining of flexure-based mechanisms, it allows to reduce the total number of solutions and thus facilitates the practical use of the concept. The second part of this work details the mechanical design of the building bricks, whose main challenge consists in increasing the ratio between the working ranges of the mechanisms and their overall size. One or more flexure-based solutions have been developed for each motorised brick: a special emphasis is given to the original use of a Remote Centre of Motion, which allows to achieve high rotation angles while drastically reducing parasitic translations. The development of a standardised actuation sub-brick, common to all motorised bricks, introduces a new level of modularity, thus increasing even more the flexibility of the methodology. As for non-actuated bricks, original designs and uncommon uses of well-known mechanisms are proposed. A case study on a 5-degree of freedom robot, Legolas 5, finally illustrates the practical use of the methodology: first, the selection in the solution catalogue of a kinematics adapted to the specifications of the robot is detailed. Then, the development of the Legolas 5 prototype highlights the mechanical design of the necessary building bricks, as well as assembly subtleties, such as force alignment and gravity compensation, which allow to shrewdly design a high-performance robot. The measurements of this machine have shown motion resolution and repeatability of 50 nm in translation and 1.9 µrad in rotation (limited by the sensor resolution). This case study has generated the Legolas family, a new family of ultra-high precision parallel robots, which notably includes the orthogonal version of the Delta kinematics: using only 6 of the conceptual building bricks, one solution can be built for each of the 19 possible robot mobilities. The promising characterisation of the Legolas 5 tends to suggest that the robots from this family will be interesting candidates to fulfill the upcoming need for quickly designed and high-performance industrial ultra-high precision machines.

EPFL2012

Design of hybrid-kinematic mechanisms for machine tools

Patric Pham

The machine tool industry is a well established, old and extremely important branch of today's manufacturing industry. With the ongoing globalization and the resulting increase of competition in this industry, the manufacturers have to push their technology to the limits in order to stay competitive. The architecture (kinematics) of most machine tools is based on a serial arrangement of joints and segments, like a human arm. The requirements regarding dynamics, stiffness and precision of these machines brought the scientists and industries to evaluate parallel kinematics for this type of application. Parallel kinematics possess a much higher potential to fulfill these demands, and they would therefore allow the access to a next level of machine performance. Whereas the success of parallel kinematics in domains like packaging is incontestable, it proved to be less evident in machine tools. The low rotation amplitudes and the complexity of the mechanism, the main weak points of parallel kinematics, slow down the development and integration of this kind of machines. In the last few years however, we could observe an increase in development, and more important, in the sales (1)(37)(54) of hybrid kinematic machines. Hybrid kinematics can, by appropriate combination of parallel and serial axes, present a well performing compromise, especially in the machine tool domain where 5 axes/mobilities and high rotation amplitudes are common. The present document is concerned with the mechanical, industrialized design of hybrid-kinematic machine tools and their mechanical elements, and will show that "Hybrid-kinematic mechanisms can outperform fully-parallel mechanisms considering all attributes for a successful and industrialized machine design." The work will point out the limits of fully-parallel mechanisms and justify the use of hybrid solutions. The most important elements of the mechanisms, thereof particularly the spherical and universal joints, will be treated in a detailed manner. Industrialization aspects will be analyzed, the difficulty for their integration will be shown, and solutions provided in order to increase the accessibility of hybrid and parallel mechanisms. A design methodology will be synthesized from all these elements and applied to three case studies. The methodology will point out important and often neglected steps and provide elements and tools to support the designer in the whole process of creation. Furthermore, by providing a broad catalogue of both new and existing hybrid and parallel kinematics, this work is intended to stimulate and inspire the creativity of the designer. The three final cases studies, each differing in their application domain and representing each an unpublished concept, will illustrate and validate the methodology. The work took place around multiple industrial projects and therefore always keeps in mind the practical feasibility, with respect to an industrial environment, and the economic aspects and risks.

EPFL2009

Design and development of the point-ahead angle mechanism for the lase interferometer space antenna (LISA)

Simon Nessim Henein, Philippe Schwab

The Point Ahead Angle Mechanism (PAAM) for ESA’s Laser Interferometer Space Antenna (LISA) mission will compensate the out-of-plane point-ahead angle between three satellites flying 5 million kilometres apart. The PAAM consists of a mirror supported by flexures allowing the mirror to rotate with a maximum stroke of ±1 mrad. The mirror is actuated in 0.14 μrad steps by two redundant linear Piezo LEGS® actuators driving a sine-bar. Since the actuators are self-locking, a special lever performing the role of a linear mechanical differential is used to provide redundancy. The design uses high-precision flexures to minimise mirror parasitic piston displacements in the picometres range. The angle is driven in closed loop using two capacitive sensors. This paper presents the mechanism at the design stage of an elegant breadboard (EBB) ready for tests. The performance requirements are summarized, then the overall concept of the mechanism is described, at last the key aspects of the detailed design are discussed: flexures design, kinematic structure, kinematic mount, redundant piezo-actuation, sensors and control. Optimisation of the design has shown that the selected high-precision design can meet the stringent requirements of fine positioning and severe environments.