We report on a novel gas spectrometry technique using pyroelectric thin-him arrays. The 1 x 50 element arrays of PZT are integrated onto silicon using a membrane structure. The experimental characterization of the pyroelectric elements shows both high voltage and current responses in defined frequency ranges. Mounting the array as a detector in a commercial spectrometer, we demonstrate its capability of detecting the infrared absorption curves of gases by the example of CO2. (C) 1998 Elsevier Science S.A. All rights reserved.
Christophe Ballif, Luca Massimiliano Antognini, Samira Alexandra Frey, Mohammad Beygi
Kristin Schirmer, Juliane Hollender, Fabian Gerhard Peter Balk
Aïcha Hessler-Wyser, Johann Michler, Amit Sharma, Caroline Hain, Daniele Casari, Thomas Nelis