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Properties of aluminum nitride thin films for piezoelectric transducers and microwave filter applications

Publications associées (46)

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AIN Thin Film Structures for High-Q Resonators

Alvaro Artieda

The development of wireless and mobile communication in the last decade led to the elaboration of new components based on thin films with continually increasing performance and reduced fabrication cost. A fundamental element for mobile communication is the ...

EPFL2010

Dielectric and acoustical high frequency characterisation of PZT thin films

Paul Muralt, Janine Conde

Pb(Zr, Ti)O-3 (PZT) is an interesting material for bulk acoustic wave resonator applications due to its high electromechanical coupling constant, which would enable fabrication of large bandwidth frequency filters. The major challenge of the PZT solid solu ...

Iop Publishing Ltd, Dirac House, Temple Back, Bristol Bs1 6Be, England2010

Epitaxial piezoelectric MEMS on silicon

Nico de Rooij, Danick Briand, Pattanaphong Janphuang, Don Isarakorn

This paper reports on the microfabrication and characterization of piezoelectric MEMS structures based on epitaxial Pb(Zr0.2Ti0.8)O-3 (PZT) thin films grown on silicon wafers. Membranes and cantilevers are realized using a sequence of microfabrication proc ...

Institute of Physics2010

CO2DE: a decision support system for collaborative design

Paul Xirouchakis, Duck Young Kim

This paper introduces an easy-to-use decision support system for COllabOrative DEsign named CO2DE. We examine the system particularly for the design concept filtering and selection stages considering the importance of conceptual design although the propose ...

Taylor & Francis2010

High coupling materials for thin film bulk acoustic wave resonators

Janine Conde

Radio frequency (RF) filters based on bulk acoustic wave resonances in piezoelectric thin films have become indispensable components in mobile communications. The currently used material, AlN, exhibits many excellent properties for this purpose. However, i ...

EPFL2009

Micromachined tunable devices based on silicon integrated BaxSr1-xTiO3 thin films

Andreas Nöth

Thin Film Bulk Acoustic Wave Resonators (TFBARs) had been developed a decade ago and since then were implemented extensively in mobile communications devices. The "heart" of a TFBAR consists of a piezoelectric film that operates as an acousto-electric tran ...

EPFL2009

Nanogap MEM resonators on SOI

Nicoleta-Diana Ciressan

Today's consumer electronics based on a large variety of time-keeping and frequency reference applications is based on quartz-crystal oscillators, because of their excellent performances in terms of quality factor, thermal and frequency stability. However, ...

EPFL2009

Piezoelectric materials parameters for piezoelectric thin films in GHz applications

Paul Muralt, Marco Cantoni, Alvaro Artieda, Janine Conde

Piezoelectric thin films have existing and promising new applications in microwave filter technologies. The final performance depends on many parameters, and very specifically on the materials properties of each involved material. In this article, material ...

Cambridge University Press2009

Micromachined Dielectric Elastomer Actuators with Ion Implanted Electrodes

Herbert Shea, Samuel Rosset, Muhamed Niklaus

We summarize recent results on micromachined dielectric elastomer actuators (DEA), or artificial muscles, whose compliant electrodes are made by low energy ion-implantation into an elastomer. Out-of-plane displacements in buckling mode of over 25% of the d ...

2009

PMBAR* - shear mode TFBAR based on (001)AlN thin film Piezo-Modulated Bulk Acoustic wave Resonator

Paul Muralt, Evgeny Milyutin

A novel concept for shear mode Bulk Acoustic Resonators (BAR) is presented. It is based on c-axis oriented AlN thin films grown on silicon dioxide thin films, combined with interdigitated electrodes. Such a structure leads to an excitation of mainly shear ...

Ieee Service Center, 445 Hoes Lane, Po Box 1331, Piscataway, Nj 08855-1331 Usa2008