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Lecture
Are you an EPFL student looking for a semester project?
Work with us on data science and visualisation projects, and deploy your project as an app on top of Graph Search.
This lecture covers the evaluation of thin film quality and resistance using various metrology techniques such as optical microscopy and resistivity meters. It explains the Van der Pauw 4-point measurement method for assessing metal film quality and calculating resistivity. The lecture also discusses the measurement of Cr resistivity in bi-morph structures and the calculation of Cr resistance based on dimensions. Additionally, it explores the use of a prober station for electronic characterization and the importance of proper test pattern design to avoid device burnout and ensure ohmic contact.