Single Core Fully Integrated CMOS Micro-Fluxgate Magnetometer

A new fully integrated 2D micro-fluxgate magnetometer is presented. This magnetometer is integrated in a standard CMOS process and uses a ferromagnetic core integrated on the chip by a photolithographic post process compatible to the integrated circuit technology. This core is placed diagonally above four excitation coils, two for each measurement axis. A novel electronic signal extraction technique is presented, whose realization results in a magnetic sensitivity of 160 V/T and a linear range of ± 50 μT. The magnetic equivalent noise spectral density is 70 nT/√Hz at 1 Hz, and the total power consumption is as low as 25 mW for the 5 V power supply.