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Femtosecond laser manufacturing combined with chemical etching has recently emerged as a flexible platform for fabricating three-dimensional devices and integrated optical elements in glass substrates. Here, we demonstrate an optically transparent micro-actuator fabricated out of a single piece of fused silica. This work paves the road for further functional integration in glass substrate and optically transparent microsystems.
Camille Sophie Brès, Marco Clementi, Jiaye Wu, Qian Li
Kirsten Emilie Moselund, Chang Won Lee
Tobias Kippenberg, Rui Ning Wang, Andrey Voloshin, Xinru Ji, Zheru Qiu, Andrea Bancora, Yang Liu