Structural and mechanical properties of Nb-1 (-) xTixN thin films deposited by rf magnetron sputtering

Alireza Karimi, Daniela Dumitriu La Grange
2016
Journal paper

Abstract

Nb1-xTixNy thin films with different nitrogen contents (0.5 < y < 1.2) and Nb/Ti ratios (0

Official source

https://infoscience.epfl.ch/record/219652?ln=en

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Structural and mechanical properties of Nb-1 (-) xTixN thin films deposited by rf magnetron sputtering

In Situ and Time-Resolved Transmission Electron Microscopy of Nanoscale Processes

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