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Publication
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Dual mode bulk acoustic wave resonators were fabricated using tilted c-axis oriented grains. In this case, longitudinal and shear modes are excited at the same time. The stiffness matrix for the tilted geometry was derived, and served to determine c(33) and c(44) from the two basic resonance frequencies. In addition, it was possible to estimate the tilting angle from the ratio of the sound velocities.
Giovanni Boero, Fabio Donati, Soyoung Oh
David Lyndon Emsley, Federico De Biasi, Yu Rao, Dominik Józef Kubicki, Amrit Venkatesh