MICRO-470: Scaling laws in micro & nanosystems

Summary

This class adresses scaling laws in MEMS/NEMS. The dominant physical effects and scaling effects when downsizing sensors and actuators in microsystems are discussed, across a broad range of actuation principles.

Official source

https://edu.epfl.ch/coursebook/en/scaling-laws-in-micro-nanosystems-MICRO-470

Moodle Page

http://go.epfl.ch/MICRO-470

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Ontological neighbourhood

Physics

Electromagnetism: Electrical networks, Electrodynamics

Mechanics: Fluid mechanics

Instructor

Lectures in this course (59)

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