Microelectromechanical systems

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Microelectromechanical systems

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Integration of Ultra-Low Volume Pneumatic Microfluidics with a Three-Dimensional Electrode Network for On-Chip Biochemical Sensing

Edge-contact MoS2 transistors made by thermal scanning probe lithography

Deep-UV approaches and printing of indium zinc oxide thin-film transistors targeting their processing on thermosensitive substrates

Vibration monitoring based on optical sensing of mechanical nonlinearities in glass suspended waveguides

FEM simulation: Thermal properties of thin film quartz and silicon resonators

Simulation of silicon KOH and dry etching methods for micromould fabrication

Single crystal diamond gain mirrors for high performance vertical external cavity surface emitting lasers

Grayscale e-beam lithography: Effects of a delayed development for well-controlled 3D patterning

Real- and Q-space travelling: multi-dimensional distribution maps of crystal-lattice strain (epsilon(044)) and tilt of suspended monolithic silicon nanowire structures

Tolerancing the surface form of aspheric microlenses manufactured by wafer-level optics techniques