Publications related to Microtechnology

Micro 3D printing of a functional MEMS accelerometer

Luis Guillermo Villanueva Torrijo, Damien Maillard, Göran Stemme, Simone Pagliano

Microelectromechanical system (MEMS) devices, such as accelerometers, are widely used across industries, including the automotive, consumer electronics, and medical industries. MEMS are efficiently produced at very high volumes using large-scale semiconduc ...

SPRINGERNATURE2022

Ion beam etching redeposition for 3D multimaterial nanostructure manufacturing

Philippe Renaud, Arnaud Bertsch, Benoît Xavier Emmanuel Desbiolles

A novel fabrication method based on the local sputtering of photoresist sidewalls during ion beam etching is presented. This method allows for the manufacture of three-dimensional multimaterial nanostructures at the wafer scale in only four process steps. ...

2019

Microstereolithography

Philippe Renaud, Arnaud Bertsch

Microstereolithography is a 3D microfabrication technology that is fundamentally different from the techniques commonly used in cleanroom environment for the manufacturing of MEMS components. Most microfabrication techniques evolved from the microelectroni ...

Elsevier / William Andrew Publishing2019

Micromechanical resonators with sub-micron gaps filled with high-k dielectrics

Mariazel de la Candelas Maqueda López

Scaled microelectromechanical (MEMS) resonating devices have generated a great interest for their use in RF front-end architectures for wireless communication, channel-select filters, on-chip signal processing and timing and extreme mas sensing application ...

EPFL2017

On the micrometre precise mould filling of liquid polymer derived ceramic precursor for 300-µm-thick high aspect ratio ceramic MEMS

Jürgen Brugger, Rosario Maurizio Gullo, Jonas Grossenbacher

This paper describes a novel and scalable method for the fabrication of polymer derived ceramics (PDC) structures with high aspect ratio and micrometre scale features. Elastomeric micro-moulds composed of a filling pot are used to deliver via sacrificial m ...

Elsevier2015

Study of bending reliability and electrical properties of platinum lines on flexible polyimide substrates

Nico de Rooij, Danick Briand, Jérôme Courbat, Francisco Molina Lopez

We have experimentally studied the variation in electrical resistance of flexible platinum lines patterned on polyimide foil when they are subjected to circular bending constraints. The lines were patterned by means of standard photolithography and sputter ...

Elsevier2014

Characterization of piezoelectric material for micro thermal harvesters

Paul Muralt, Emilie Catherine Sylviane Trioux

This paper presents the first realizations of a novel concept for thermal energy harvesting at micro scale. The devices proposed here are based on a two-step transduction combining thermo-mechanical and piezoelectric conversion. In this contribution, we pr ...

IOP Publishing Ltd2014

Optimizing Parylene C Adhesion for MEMS Processes: Potassium Hydroxide Wet Etching

Philippe Renaud, Olha Sereda, Joanna Katarzyna Bitterli, Martha Liley, Herbert Keppner

Parylenes are used for a wide range of applications in microelectromechanical systems (MEMS) devices. However, their poor adhesion in a harsh liquid environment can limit the fabrication processes of complex MEMS and bioMEMS devices. Potassium hydroxide (K ...

Ieee-Inst Electrical Electronics Engineers Inc2013

Making MEMS more suited for Space: Assessing the proton-radiation tolerance of structural materials for microsystems in orbit

Herbert Shea, Antonia Neels, Alex Dommann, Tobias Bandi

We report on the susceptibility of structural MEMS materials to proton radiation damage. Radiation tests at spacerelevant doses were conducted on MEMS resonators. The two materials examined were single crystal silicon and SU-8, which are both in widespread ...

2013

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