Explores silicon etching techniques, fabrication of the Utah array, impedance measurements, and active silicon probes for neural recordings.
Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Explores sensor technologies in MEMS, focusing on pressure sensors, accelerometers, and gyroscopes, and highlights the significance of sensor fusion.
Explores actuators, optical MEMS, micromirrors, and advanced MEMS systems for mobile and consumer electronics.
