Concept
MEMS
Related lectures (116)
Optical MEMS Basics and Applications
Explores Optical MEMS basics, actuation mechanisms, applications, market overview, key metrics in fiber-optic devices, and tunable lasers.
Ion Beam EtchingMOOC: Micro and Nanofabrication (MEMS)
Introduces ion beam etchers, combining physical sputtering with chemical activity.
Surface Profiling TechniquesMOOC: Micro and Nanofabrication (MEMS)
Explores surface profiling techniques like white light interferometry and laser beam profiling, emphasizing their non-contact nature and high resolution.
Electrostatic MEMS: Scaling Laws & Simulations
Explores scaling laws, simulations, and challenges in electrostatic MEMS, focusing on energy density, capacitance, actuators, and practical applications in haptic gloves.
Dry Etching: Techniques and EquipmentMOOC: Micro and Nanofabrication (MEMS)
Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.
Etch Stop TechniquesMOOC: Micro and Nanofabrication (MEMS)
Explores etch stop techniques, including B implantation, electrochemical etch stops, and bulk micromachining examples in micro and nanofabrication.
Electrostatics in MEMS: Scaling Laws & Applications
Explores scaling laws and applications of electrostatics in MEMS, covering topics like parallel plate capacitors, zipping actuators, and MEMS gyroscopes.
Wet Etching: Thin Films and MicrofabricationMOOC: Micro and Nanofabrication (MEMS)
Explores wet etching processes, including anisotropic and isotropic etching, thin membrane microfabrication, and applications in microfabrication.
Deep Reactive Ion Etching: High Aspect Ratio Structures
Explores deep reactive ion etching for high aspect ratio structures and the Bosch process.
Low Power Sensor Technology for IoT and Wearables
Covers low power sensor technology for IoT and wearables, focusing on activity sensors based on MEMS and biosignals.