Concept

Extreme ultraviolet lithography

Related publications (318)

Identification and thermal healing of focused ion beam-induced defects in GaN using off-axis electron holography

Nicolas Grandjean, Jean-François Carlin, Raphaël Butté, Yi Wang

Thermal healing of focused ion beam-implanted defects in GaN is investigated by off-axis electron holography in TEM. The data reveal that healing starts at temperatures as low as about 250 degrees C. The healing processes result in an irreversible transiti ...

Bristol2024

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Over the last decades, three-dimensional micro-manufacturing of fused silica via near-infrared ultrafast laser exposure combined with an etching step has become an established technique for producing complex three-dimensional components. Here, we explore t ...

2023

Laser-Induced Forward Transfer of Functional Microdevices

Zhiwei Yang

Laser-induced forward transfer (LIFT) technique is an emerging micro additive manufacturing (AM) technique that has been widely used to print a variety of materials. Distinguished from other nozzle-based AM techniques, LIFT operates without the existence o ...

EPFL2023

Fully Aromatic Self-Assembled Hole-Selective Layer toward Efficient Inverted Wide-Bandgap Perovskite Solar Cells with Ultraviolet Resistance

Mohammad Khaja Nazeeruddin, Peng Gao, Ye Yang, Chaohui Li, Wei Yu

Ultraviolet-induced degradation has emerged as a critical stability concern impeding the widespread adoption of perovskite solar cells (PSCs), particularly in the context of phase-unstable wide-band gap perovskite films. This study introduces a novel appro ...

Weinheim2023

PET REBINNING WITH REGULARIZED DENSITY SPLINES

Michaël Unser

PET reconstruction algorithms have long relied on sinogram rebinning. However, as detectors grow smaller in a recent wave of cutting-edge scanners, individual sensors no longer accrue hundreds of photons. Instead, most detect a single photon or none at all ...

New York2023

Photonic assembly tunable via the pockels effect and method for use in frequency-modulated lidar

Tobias Kippenberg, Viacheslav Snigirev, Grigorii Likhachev

A photonic assembly, a laser setup comprising said photonic assembly and a method for performing frequency-modulated continuous-wave light detection and ranging using said laser setup are disclosed. The photonic assembly (1) comprises an active photonic ch ...

2023

Additive manufacturing of ceramics by two-photon lithography, volumetric 3D printing and high-resolution endo-printing.

Georgia Konstantinou

Additive manufacturing is a growing sector of industrial production that allows the fabrication of parts with complex geometries and reduced waste. The context of this thesis is light-based additive manufacturing technologies. In the first part of the thes ...

EPFL2022

A Low-Temperature Annealing Method for Alloy Nanostructures and Metasurfaces: Unlocking a Novel Degree of Freedom

Olivier Martin, Christian Santschi, Debdatta Ray, Hsiang-Chu Wang, Jeonghyeon Kim

The material and exact shape of a nanostructure determine its optical response, which is especially strong for plasmonic metals. Unfortunately, only a few plasmonic metals are available, which limits the spectral range where these strong optical effects ca ...

WILEY-V C H VERLAG GMBH2022

Lock-in amplified differential phase contrast

Christophe Moser, Timothé Laforest, Damien Claude-Marie Loterie, Chiara Bonati

We introduce a lock-in method to increase the phase contrast in incoherent Differential Phase Contrast (DPC) imaging. The use of a smart pixel detector with in-pixel signal demodulation, paired with synchronized illumination, provides the basis of a bit-ef ...

SPIE-INT SOC OPTICAL ENGINEERING2022

Lock-in incoherent differential phase contrast imaging

Christophe Moser, Timothé Laforest, Damien Claude-Marie Loterie, Chiara Bonati

We introduce a lock-in method to increase the phase contrast in incoherent differential phase contrast (DPC) imaging. This method improves the phase sensitivity by the analog removal of the background. The use of a smart pixel detector with in-pixel signal ...

CHINESE LASER PRESS2022

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