Sebastian GautschSebastian Gautsch is section adjunct in Microengineering at EPFL. He received his M.A.Sc. Degree in Electronical physics from the University of Neuchâtel, Switzerland in 1998. He did his Ph.D. degree in the field of micro-mechanical systems at the Institute of Microtechnology (IMT), University of Neuchâtel, in 2001. His PHD thesis was done in collaboration with NASAs Jet Propulsion Laboratory (JPL) in Pasadena and led to the successful operation of an Atomic Force Microscope on the Phoenix Mission to the Planet Mars in 2008. This achievement had a broad impact in the media. In parallel to his research activities he pursued an international swimming career until 2003. He then acquired the Federal Certificate in Sport Coaching in 2007 delivered by the Swiss Olympic Federation and coached the Elite Swimming Team of Red-Fish Neuchâtel between 2004 and 2009. He was instrumental in initiating and coordinating the Cantonal Olympic Project to support potential olympians. He was part of the coaching delegation at several international events for the Swiss Swimming National Team and qualified more than 20 swimmers for European, World Championships and the Olympic Games of Beijing in 2008. Between 2004 and 2013 he successfully led the research activities in the field of Tools for Nanoscience at the Institute of Microengineering of EPFL at the Sensors, Actuators and Microsystems Laboratory (SAMLAB) of Prof. Nico de Rooij. In 2011, he led the R&D activities in Electron Beam Lithography for the Centre Suisse d'Electronique et de Microtechnique (CSEM). He was instrumental in creating the Swiss Chapter of the Mars Society in 2011 and is currently Vice President. Between 2011 and 2018 he lectured at the Bern University of Applied Science in the field of Micro and Medical Technology.Between 2012 and 2020 he coordinated the Industrial Internships Program for Master students at the School of Engineering. He was instrumental in setting up coordinated master thesis in industry, the Engineering Industry Day, and the sustainable internships label. Between 2018 and 2020 he coordinated academic outreach initiatives like the E3 research internship program and the Engineering PhD Summit . Google Scholar publication page:
Paul MuraltPaul Muralt received a diploma in experimental physics in 1978 at the Swiss Federal Institute of Technology ETH in Zurich. He accomplished his Ph.D. thesis in the field of commensurate-incommensurate phase transitions at the Solid State Laboratory of ETH. In the years 1984 and 1985 he held a post doctoral position at the IBM Research Laboratory in Zurich where he pioneered the application of scanning tunneling microscopy to surface potential imaging. In 1987, after a stay at the Free University of Berlin, he joined the Balzers group in Liechtenstein. He specialized in sputter deposition techniques, and managed since 1991 a department for development and applications of Physical Vapor Deposition and PECVD processes. In 1993, he joined the Ceramics Laboratory of EPFL in Lausanne. AS group leader for thin films and MEMS devices, he specialized in piezoelectric and pyroelectric MEMS with mostly Pb(Zr,Ti)O3 and AlN thin film. His research interests are in thin film growth in general, and more specifically in property assessment of small ferroelectric structures, in integration issues of ferroelectric and other polar materials, property-microstructure relationships, and applications of polar materials in semiconductor and micro-electro-mechanical devices. More recently he extended his interests to oxide thin films of ionic conductors. The focus in piezoelectric thin films was directed towards AlN-ScN alloys. He gives lectures in thin film processing, micro fabrication, and surface analysis. He authored or co-authored more than 230 scientific articles. He became Fellow of IEEE in 2013. In 2005, he received an outstanding achievement award at the International Symposium on Integrated Ferroelectrics (ISIF), and in 2016 the B.C. Sawyer Memorial award.
Chairman of the International Workshops on Piezoelectric MEMS(http://www.piezomems2011.org/) Hatice Altug2020-current Full Professor at the Institute of Bioengineering, EPFL, Switzerland2013-2020 Associate Professor (with tenure) at the Institute of Bioengineering, EPFL, Switzerland 2013 Associate Professor (with tenure) at Electrical and Computer Engineering Department of Boston University, USA 2007-2013 Assistant Professor (tenure-track) at Electrical and Computer Engineering Department of Boston University, USA 2007 Post-doctoral Fellow at Center for Engineering in Medicine of Harvard Medical School, USA 2000-2007 PhD. in Applied Physics at Stanford University, USA 1996-2000 B.S. in Physics at Bilkent University, Turkey
Cyrille HibertCyrille HIBERT received his diploma in Physics in 1994 and his PhD in 1998 from University of Orleans (FR). He then held a post doctoral position in GREMI laboratory at the University of Orleans in collaboration with Alcatel Vacuum Technology and ST Microelectronics, working in deep anisotropic etching of silicon with an Inductively Coupled Plasma reactor. In May 2000 he joined the EPFL-Center of Micro-Nano-technology where he was in charge of the plasma etching activities. He left EPFL in October 2003 for a sabbatical year to join the CFF group at NMRC (Ireland) now called Tyndall Institute. He worked on developing plasma processing. In October 2004, he came back to EPFL-CMI to be in charge of etching and nanotechnology activities (FIB and future ebeam litho).
