Publications related to Photolithography

Nanostructured high refractive index titanium oxide films

Jürgen Brugger, Vaida Auzelyte, Agnese Virginia Savegnago

Titanium oxide due to its optical properties, such as high refractive index, transparency to visible light and photocatalytic properties is being used in a large number of devices such as micro-optical elements and solar cells. The fabrication of TiO2 micr ...

2011

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

Nico de Rooij, Peter Van der Wal, Sotiria Psoma

A novel one-step microfabrication process of SU-8 films for the development of inexpensive light-weight and small size optical glucose micro-biosensors is proposed. Experimental work was carried out in order to investigate whether SU-8 photoresists, which ...

2011

Opto-thermal actuation in double layer polymer microcantilevers

Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos

Photostructurable polymers, such as SU-8, have large potential impact on the field of MEMS/NEMS, allowing simple fabrication of plastic MEMS/NEMS devices with nearly vertical sidewalls and high aspect ratios using standard photolithographic procedures. Fun ...

2011

Silicon Nanowire Arrays and Crossbars: Top-Down Fabrication Techniques and Circuit Applications

Giovanni De Micheli, Davide Sacchetto, Yusuf Leblebici, Pierre-Emmanuel Julien Marc Gaillardon, Mohamed Haykel Ben Jamaa

Several nanowire technologies have emerged recently, providing a way to continue the scaling down of complementary metal-oxide-semiconductor (CMOS) technology. The opportunities offered at the level of logic circuit design depend on the technology properti ...

2011

Planar Integrated Sensors on Waveguides for sensing applications

Hans Peter Herzig, Qing Tan, Armando Cosentino

We investigate the use of a metallic nano-cavity on dielectric waveguides for sensing applications. Nowadays the fabrication of metallic structures featured by challenging dimensions is feasible thanks to the most recent technologies such as E-Beam Lithogr ...

2011

Nanoimprint Lithography for High-Efficiency Thin-Film Silicon Solar Cells

Christophe Ballif, Franz-Josef Haug, Corsin Battaglia, Jordi Escarre Palou, Matthieu Despeisse, Mathieu Gérard Boccard, Stefaan De Wolf, Grégory Bugnon, Loris Barraud, Laura Ding, Karin Söderström, Adrian Billet

We demonstrate high-efficiency thin-film silicon solar cells with transparent nanotextured front electrodes fabricated via ultraviolet nanoimprint lithography on glass substrates. By replicating the morphology of state-of-the-art nanotextured zinc oxide fr ...

American Chemical Society2011

Advances in Nanostenciling: resistless nanopatterning enables new applications

Jürgen Brugger, Andreea Veronica Savu

This paper presents the state-of-the-art of nanostencil as a direct and local patterning method. Stencil lithography is a high-resolution shadow mask technique that allows structuring surfaces without using the harsh process steps typically associated with ...

2011

Oxide nanocrystal based nanocomposites for fabricating photoplastic AFM probes

Jürgen Brugger, Cristina Martin Olmos

We report on the synthesis, characterization and application of a novel nanocomposite made of a negative tone epoxy based photoresist modified with organic-capped Fe2O3 nanocrystals (NCs). The mechanical properties of the nanocomposite drastically improve ...

2011

Micromorph thin-film silicon solar cells with transparent high-mobility hydrogenated indium oxide front electrodes

We investigate the performance of hydrogenated indium oxide as a transparent front electrode for micromorph thin-film silicon solar cells on glass. Light trapping is achieved by replicating the morphology of state-of-the-art zinc oxide electrodes, known fo ...

American Institute of Physics2011

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Photolithography

Nanostructured high refractive index titanium oxide films

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

Opto-thermal actuation in double layer polymer microcantilevers

Self Aligned Concentric Nanostructures Formed by E-beam Overexposure of PMMA and Single Post Processing Steps

Silicon Nanowire Arrays and Crossbars: Top-Down Fabrication Techniques and Circuit Applications

Planar Integrated Sensors on Waveguides for sensing applications

Nanoimprint Lithography for High-Efficiency Thin-Film Silicon Solar Cells

Advances in Nanostenciling: resistless nanopatterning enables new applications

Oxide nanocrystal based nanocomposites for fabricating photoplastic AFM probes

Micromorph thin-film silicon solar cells with transparent high-mobility hydrogenated indium oxide front electrodes

Graph Chatbot

Chat with Graph Search

Oxide nanocrystal based nanocomposites for fabricating photoplastic AFM probes

Advances in Nanostenciling: resistless nanopatterning enables new applications

PROOF OF CONCEPT OF A NOVEL OPTICAL GLUCOSE ENZYME-BASED MICRO-BIOSENSOR USING SU-8

Nanostructured high refractive index titanium oxide films

Opto-thermal actuation in double layer polymer microcantilevers

Planar Integrated Sensors on Waveguides for sensing applications

Silicon Nanowire Arrays and Crossbars: Top-Down Fabrication Techniques and Circuit Applications

Nanoimprint Lithography for High-Efficiency Thin-Film Silicon Solar Cells

Self Aligned Concentric Nanostructures Formed by E-beam Overexposure of PMMA and Single Post Processing Steps

Micromorph thin-film silicon solar cells with transparent high-mobility hydrogenated indium oxide front electrodes