Related lectures (63)
Lithography: Photoresist Sensitivity and Modulation Transfer FunctionMOOC: Micro and Nanofabrication (MEMS)
Discusses photoresist properties in lithography resolution and the role of the optical transfer function.
Design Preparation and Fracture: Electron Beam LithographyMOOC: Micro and Nanofabrication (MEMS)
Explores design preparation, fracture, and electron beam lithography processes in nanofabrication.
Clip Mask FabricationMOOC: Micro and Nanofabrication (MEMS)
Showcases the practical steps of fabricating a mask for UV lithography.
Direct Light Processing: DLP
Explores Digital Light Processing (DLP) technology, comparing it to Stereolithography (SLA) and Polyjet, discussing its process, materials, and applications.
Fabrication Technology
Covers the process integration in semiconductor fabrication, including twin-well process, isolation methods, threshold voltage adjustment, and silicide formation.
Additive Manufacturing: Resolution and Build Speed
Explores the resolution and build speed in additive manufacturing, stereolithography, micro-stereolithography, cost comparisons, customization of items, and support structures.
Electron Beam Lithography: Proximity Effect CorrectionsMOOC: Micro and Nanofabrication (MEMS)
Explores proximity effect corrections in electron beam lithography for small and large features, emphasizing the importance of beam point spread function modeling.
Solid Ground Curing: Principles and Examples
Explores the Solid Ground Curing process, its consolidation mechanism, advantages, and applications in additive manufacturing.
Lithography: Nanoscale Patterning Techniques
Explores lithography fundamentals, nanofabrication challenges, and advanced patterning techniques for high-resolution production.
Physical Vapor Deposition: Evaporation TechniquesMOOC: Micro and Nanofabrication (MEMS)
Explores Physical Vapor Deposition techniques, including shadowing effects and equipment specifications for evaporation processes in micro and nanofabrication.

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