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Covers the fundamentals of Scanning Probe Microscopy, including its history, principles, instruments, and applications in semiconductor research and industry.
Explores MEMS resonators and oscillators, CMOS integration, frequency stability, temperature drift compensation, resonator packaging, and advanced resonator structures.
Explores self-sensing cantilevers in Scanning Probe Microscopy and the advantages of integrated sensor-actuator systems for high-speed data collection.
Covers the introduction to Micro-Electro-Mechanical Systems (MEMS), including operating principles, elements, scaling laws, silicon choice, sensors, and actuators.
Explores transduction through actuation mechanisms, covering force-based and deformation-based methods, shape memory polymers, electrostatic and magnetic actuation principles, and examples like Texas Instruments DLP & DMD.
