MEMS Resonators and Oscillators

This lecture covers the development of MEMS resonators and oscillators, focusing on their integration with CMOS circuits, challenges in linearity, power handling, and frequency stability. It discusses the replacement of Quartz with silicon resonators, the electro-mechanical resonator operation, metallized beam structures, equivalent circuits, and series/parallel resonances. The lecture also explores CMOS integration strategies, frequency stability improvement techniques, temperature drift compensation methods, and wafer-scale packaging of resonators. It concludes with discussions on bulk-mode and in-plane bulk-mode resonators, internal electrostatic transduction, and the importance of coupling with piezo for resonator advancement.