Lecture

Scanning Probe Microscopy: Fundamentals

In course

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Description

This lecture introduces Scanning Probe Microscopy (SPM), covering its history, comparison with other microscopy techniques, advantages, and challenges. It explains the principles of SPM, including Quantum Tunneling, and discusses the development of SPM instruments like the Stylus Profilometer and the Piezo Scanner. The lecture also explores the application of SPM in semiconductor research and industry, emphasizing the high spatial resolution and 3D imaging capabilities it offers.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_02u80fro

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