Concept
Semiconductor device fabrication
Related people (374)
Michael Graetzel
to be added
Paul Muralt
Paul Muralt received a diploma in experimental physics in 1978 at the Swiss Federal Institute of Technology ETH in Zurich. He accomplished his Ph.D. thesis in the field of commensurate-incommensurate phase transitions at the Solid State Laboratory of ETH. In the years 1984 and 1985 he held a post doctoral position at the IBM Research Laboratory in Zurich where he pioneered the application of scanning tunneling microscopy to surface potential imaging. In 1987, after a stay at the Free University of Berlin, he joined the Balzers group in Liechtenstein. He specialized in sputter deposition techniques, and managed since 1991 a department for development and applications of Physical Vapor Deposition and PECVD processes. In 1993, he joined the Ceramics Laboratory of EPFL in Lausanne. AS group leader for thin films and MEMS devices, he specialized in piezoelectric and pyroelectric MEMS with mostly Pb(Zr,Ti)O3 and AlN thin film. His research interests are in thin film growth in general, and more specifically in property assessment of small ferroelectric structures, in integration issues of ferroelectric and other polar materials, property-microstructure relationships, and applications of polar materials in semiconductor and micro-electro-mechanical devices. More recently he extended his interests to oxide thin films of ionic conductors. The focus in piezoelectric thin films was directed towards AlN-ScN alloys. He gives lectures in thin film processing, micro fabrication, and surface analysis. He authored or co-authored more than 230 scientific articles. He became Fellow of IEEE in 2013. In 2005, he received an outstanding achievement award at the International Symposium on Integrated Ferroelectrics (ISIF), and in 2016 the B.C. Sawyer Memorial award.
Chairman of the International Workshops on Piezoelectric MEMS(http://www.piezomems2011.org/)
Farzan Jazaeri
Farzan Jazaeri received his M.Sc. degree in 2009 from University of Tehran and his Ph.D. in electronic engineering from EPFL in 2015. He has been serving as Research Scientist at EPFL since 2015 and Senior RD Semiconductor Device Engineer in the Swatch Company since 2019.He is a recipient of the 2018 Electron Devices Society George E. Smith Award, the best talk award from MIXDES 2019 and the best paper awards from ESSDERC2018 and ESSDERC2019, and several other academic awards. He is also awarded an advanced Swiss National Science Foundation grant for two years fellowship in MIT and NASA. His doctoral thesis was recognized to be eligible for the IBM award in 2017. Dr. Jazaeri is currently research scientist and project leader in high level of international scientific collaborative activities at EPFL. His research activities on solid-state physics are focused on creation of the cryogenic temperature infrastructure necessary to operate the qubits for quantum computations(MOSQUITO), radiation-induced damages in advanced devices for the future high energy physics experiments at CERN (GigaRadMOST), Pinned Photodiodes for CIS, and modeling and characterization AlGaN-GaN heterostructure in collaboration with IMEC. Together with Dr. Sallese, he is the lead developer of EPFL HEMT MODEL for GaN HEMTs. He fully developed a new model (EPFL-JL Model) for the so-called nanowire FETs and was invited by Cambridge University Press to write a book on junctionless nanowire FETs, emerging nanoelectronic devices, already published since 2018. He serves as lead editor and reviewer for several scientific journals. He has been an invited keynote speaker at several international conferences and events. He is invited to MIXDES 2019 as a keynote speaker to address quantum bits and quantum computing architecture.From Jun 2009 to February 2010, he worked on designing and implementing SD/HD broadcast systems with SAMIM-RAYANEH Co., Tehran, Iran. Between March 2010 and November 2011 he worked as a SCADA expert in Tehran Regional Electric Co. (TREC), Tehran, Iran. From September 2010 to December 2011, he continued his research activities in nano-electronics in Tehran, Iran. In December 2011, he joined to Electron Device Modelling and Technology Lab (EDLab) and pursued his Ph.D. degree at EPFL. In 2015, he received his Ph.D. from Microsystems and Microelectronics department, Integrated Systems Laboratory (STI/IC) at EPFL, Lausanne, Switzerland.
Alexandre Schmid
Alexandre Schmid received the M.Sc. degree in microengineering and the Ph.D. degree in electrical engineering from the Swiss Federal Institute of Technology (EPFL), Lausanne, Switzerland, in 1994 and 2000, respectively. Since 1994, he has been with the EPFL, working with the Integrated Systems Laboratory as a Research and Teaching Assistant, and with the Electronics Laboratories as a Postdoctoral Fellow. In 2002, he was a Senior Research Associate with the Microelectronic Systems Laboratory, where he has been conducting research in the fields of bioelectronic interfaces and implantable biomedical electronics, nonconventional signal processing and neuromorphic hardware, and reliability of nanoelectronic devices, and also teaches with the Microengineering and Electrical Engineering Departments of EPFL. Since 2011, he is a Maître d'Enseignement et de Recherche (MER) Faculty Member with EPFL. He is a coauthor of two books, Reliability of Nanoscale Circuits and Systems, Methodologies and Circuit Architectures, Springer, 2011, and Wireless Cortical Implantable Systems, Springer, 2013, and a coeditor of one book, as well as over 100 articles published in journals and conferences.
Dr. Schmid has served as the General Chair of the Fourth International Conference on Nano-Networks in 2009 and has been serving as an Associate Editor of the Institute of Electrical, Information, and Communication Engineers Electronics Express since 2009.
Cyrille Hibert
Cyrille HIBERT received his diploma in Physics in 1994 and his PhD in 1998 from University of Orleans (FR). He then held a post doctoral position in GREMI laboratory at the University of Orleans in collaboration with Alcatel Vacuum Technology and ST Microelectronics, working in deep anisotropic etching of silicon with an Inductively Coupled Plasma reactor. In May 2000 he joined the EPFL-Center of Micro-Nano-technology where he was in charge of the plasma etching activities. He left EPFL in October 2003 for a sabbatical year to join the CFF group at NMRC (Ireland) now called Tyndall Institute. He worked on developing plasma processing. In October 2004, he came back to EPFL-CMI to be in charge of etching and nanotechnology activities (FIB and future ebeam litho).
Radivoje Popovic
Radivoje Popovic received the Dipl. Ing. degree in engineering physics from the University of Belgrade, Yugoslavia in 1969, and the M.Sc and Dr.Sc. degrees in electronics from the University of Nis, Yugoslavia in 1974 and 1978.
From 1969 to 1981, he worked for Elektronska Industrija in Nis, Yugoslavia, where from 1978 to 1981 he was head of CMOS department. From 1982 to 1993, he was with Landis & Gyr AG, Central R&D in Zug, Switzerland, where from 1991 to 1993 he was vice president.
In 1994 Popovic joined EPFL (Swiss Federal Institute of Technology, Lausanne, Switzerland), as extraordinary professor for microtechnology systems, and became ordinary professor in 1997. He taught courses in conceptual product design, semiconductor device physics, microelectronics, optical detectors, and integrated sensors; and he was adviser of 20 PhD students. Since 2010 he is professor emeritus.
Currently, he is chief technology officer of SENIS AG (www.senis.ch).
Popovic has published a book on Hall effect devices, and is author or co-author of about 280 technical papers and 93 patent applications. He is co-founder of start-up companies Sentron AG, Sentronis AD, Senis AG, Ametes AG, and Sensima Technology SA. He is member of Swiss Academy of Engineering Sciences, Serbian Academy of Engineering Sciences, and senior member of IEEE.
Note: In publications, Radivoje Popovic is mostly cited as R.S. Popovic, Radivoje S. Popovic, or Rade Popovic; in patents, he is cited as Popovic Radivoje.