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This paper presents a microsystem consisting of an overhanging xy-microstage with integrated tip and comb actuators for scanning surface profiling. The design is optimized with respect to precise xy positioning at low drive voltages and accurate detection ...
Fiber push-out tests have been performed on a ceramic matrix composite consisting of Carborundum sintered SiC fibers, with a BN coating, embedded in a reaction-bonded SiC matrix. Analysis of the push-out data, utilizing the most complete theory presently a ...
Direct writing of metal features narrower than 100 nm is accomplished by scanning a focused ion beam over a substrate covered with a thin solid metalorg. film. A metalorg. cluster coordination compd. [Ir4(CO)11Br] [N(C2H5)4] is spun on an oxidized Si wafer ...
A method is described to control the thickness of single-crystal silicon membranes, fabricated by wet anisotropic etching. The technique of an electrochemical etch-stop on an epitaxial layer is used to yield better thickness control over the silicon membra ...
Recently, polymeric carbon nitride (g-C3N4) as a proficient photo-catalyst has been effectively employed in photocatalysis for energy conversion, storage, and pollutants degradation due to its low cost, robustness, and environmentally friendly nature. The ...
A micromotor for low power applications is being developed using silicon micromachining technologies and organometallic PZT films sol-gel deposition. The construction of a hybrid ultrasonic motor suitable for batch fabrication is proposed. A fabrication pr ...
Co-impregnation of vanadia and tungsta on titania produced highly active catalysts for the reduction of nitrogen oxides with ammonia but showed aging tendencies at temperatures around 600 °C. In order to preserve their low temperature activity after hydrot ...
We fabricated and characterized a micromotor driven by a piezoelectric PZT (PbZrxTi1-xO3) thin films. Sputter and sol-gel techniques have been applied for the deposition of the PZT films onto a silicon stator membrane, which was 20 to 30 µm thick and had a ...