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The nitridation of sapphire substrates was monitored in situ by reflection high-energy electron diffraction. The evolution of the lattice-mismatch evidences the formation of an AIN relaxed layer when exposing the sapphire surface heated at 850 degrees C to ...
The effective piezoelectric transverse coefficient e(31,f) was measured on various lead zirconate-titanate (PZT) and aluminum nitride thin films. The measurement set-up is based on the collection of the electric charges created by the forced deflection of ...
The analysis of the sapphire surface nitridation by in situ reflection high-energy electron diffraction evidences the formation of a relaxed AIN layer. Its role on the early stage of the GaN growth is investigated by transmission electron microscopy (TEM). ...
The fabrication using silicon micromachining and characterization of an acoustic Lamb wave actuator is presented. The intended use of the device is for mass transport and sensor applications. The device consists of dual interdigitated transducers patterned ...
Lithography on (100) single-crystal silicon and amorphous silicon is performed by electric-field-enhanced local oxidation of silicon using an atomic force microscope (AFM). Amorphous silicon is used as a negative resist to pattern silicon oxide, silicon ni ...
Using a first-principles approach, we study the incorporation of nitrogen at the Si(001)-SiO2 interface by calculating N Is core-level shifts for several relaxed interface models. The unusually large shift with oxide thickness of the principal peak in phot ...
A micro-pump for medical applications is being developed using organometallic derived PZT thin films and silicon micromachining technology. Critical issues include the deposition of 'thick' PZT films (1 to 2 mu m thickness), film processing compatibility w ...
We tested a new soft-x-ray transmission spectromiscropy technique on the Aladdin storage ring at the Wisconsin Synchrotron Radiation Center. Transmitted x rays were converted with a photocathode into photoelectrons, which were subsequently electron-optical ...
Pyroelectric PbTiO3 thin films devices with two temperature compensating elements on a SiO2/Si3N4 membranes have been fabricated and characterized. The measured voltage responsivity as a function of radiation modulation frequency has been compared to finit ...
Thin silicon dioxide films nitrided in N2O by rapid thermal processing (RTP) or in a classical furnace were investigated by x-ray photoelectron spectroscopy, secondary ion mass spectroscopy, and electrical measurements on metal-oxide-semiconductor capacito ...