Publications related to Vacuum deposition

Combinatorial HV-CVD survey of barium triisopropyl cyclopentadienyl and titanium tetraisopropoxide for the deposition of BaTiO3

Patrik Willi Hoffmann, Yury Kuzminykh, Michael Oliver Reinke

Barium titanate is a very promising material for the integration of optical communication into electronic integrated circuits. For a successful integration into CMOS compatible technology, a growth process has to be found which allows forming crystalline B ...

Wiley-VCH Verlag Berlin2015

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

Paul Muralt, Andreea Veronica Savu, Silviu Cosmin Sandu, Estelle Wagner, Scott Harada, Giacomo Benvenuti

Chemical Beam Vapour Deposition is a gas phase deposition technique, operated under high vacuum conditions, in which evaporated chemical precursors are thermally decomposed on heated substrates to form a film. In the particular equipment used in this work, ...

Elsevier2015

Influence of doping in thermochromic V1−xWxO2 and V1−xAlxO2 thin films: Twice improved doping efficiency in V1−xWxO2

Jean-Louis Scartezzini, Andreas Schueler, Rosendo Sanjines, Antonio Paone

The parameters of thermal evaporation and magnetron sputtering deposition were optimized for fabrication of vanadium dioxide thin films. The O2 partial pressure during film deposition is critical for obtaining a pure VO2 phase. Thermochromic V1−xWxO2 (x = ...

Elsevier2015

Modeling chloride transport using travel time distributions at Plynlimon, Wales

Andrea Rinaldo, Paolo Benettin, Gianluca Botter

Here we present a theoretical interpretation of high-frequency, high-quality tracer time series from the Hafren catchment at Plynlimon in mid-Wales. We make use of the formulation of transport by travel time distributions to model chloride transport origin ...

Amer Geophysical Union2015

Surface Kinetics of Titanium Isopropoxide in High Vacuum Chemical Vapor Deposition

Patrik Willi Hoffmann, Yury Kuzminykh, Michael Oliver Reinke

Understanding the surface kinetics of precursor decomposition during thin film formation represents a key aspect in the understanding and engineering of chemical vapor deposition (CVD) and atomic layer deposition (ALD) processes. The determination of activ ...

American Chemical Society2015

Accelerated bacterial reduction on Ag–TaN compared with Ag–ZrN and Ag–TiN surfaces

César Pulgarin, Juan Kiwi, Sami Rtimi, Oualid Baghriche

Ag–TaN sputtered on polyester (PES) accelerated >6 times the bacterial inactivation kinetics compared to TaN–PES under actinic light irradiation. Direct current pulsed magnetron sputtering (DCP) was used to sputter Ag–TaN–PES and TaN–PES. Complete bacteria ...

Elsevier Science Bv2015

Tuning the porosity of zinc oxide electrodes: from dense to nanopillar films

Christophe Ballif, Benoît Florent Paul Delaup, Sylvain Nicolay, Björn Niesen, Monica Morales Masis, Lorenzo Fanni

Thin films with tunable porosity are of high interest in applications such as gas sensing and antireflective coatings. We report a facile and scalable method to fabricate ZnO electrodes with tuneable porosity. By adjusting the substrate temperature and rat ...

2015

Fabrication of CMOS-compatible abrupt electronic switches based on vanadium dioxide

Mihai Adrian Ionescu, Clara-Fausta Moldovan, Josef Andreas Schuler, Wolfgang Amadeus Vitale, Antonio Paone

Vanadium dioxide thin films were deposited on amorphous SiO2-coated Si substrates, by reactive magnetron sputtering at 490 °C of a pure vanadium target. The deposition parameters were optimized in order to maximize the resistivity modulation due to the met ...

Elsevier2015

The Biocompatibility and Anti-Biofouling Properties of Magnetic Core-Shell Fe@C NWs/AAO Nanocomposites

Mahmut Selman Sakar

Soft-magnetic core–multishell Fe@C NWs–AAO nanocomposites were synthesized using anodization, electrodeposition and low-pressure chemical vapour deposition (CVD) at 900 °C. High chemical and mechanical stability is achieved by the conversion from amorphous ...

Royal Society of Chemistry2015

Chat with Graph Search

Ask any question about EPFL courses, lectures, exercises, research, news, etc. or try the example questions below.

DISCLAIMER: The Graph Chatbot is not programmed to provide explicit or categorical answers to your questions. Rather, it transforms your questions into API requests that are distributed across the various IT services officially administered by EPFL. Its purpose is solely to collect and recommend relevant references to content that you can explore to help you answer your questions.

Vacuum deposition

Combinatorial HV-CVD survey of barium triisopropyl cyclopentadienyl and titanium tetraisopropoxide for the deposition of BaTiO3

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

Influence of doping in thermochromic V1−xWxO2 and V1−xAlxO2 thin films: Twice improved doping efficiency in V1−xWxO2

Modeling chloride transport using travel time distributions at Plynlimon, Wales

Graphitic carbon in a nanostructured titanium oxycarbide thin film to improve implant osseointegration

Surface Kinetics of Titanium Isopropoxide in High Vacuum Chemical Vapor Deposition

Accelerated bacterial reduction on Ag–TaN compared with Ag–ZrN and Ag–TiN surfaces

Tuning the porosity of zinc oxide electrodes: from dense to nanopillar films

Fabrication of CMOS-compatible abrupt electronic switches based on vanadium dioxide

The Biocompatibility and Anti-Biofouling Properties of Magnetic Core-Shell Fe@C NWs/AAO Nanocomposites

Graph Chatbot

Chat with Graph Search

Graphitic carbon in a nanostructured titanium oxycarbide thin film to improve implant osseointegration

Influence of doping in thermochromic V1−xWxO2 and V1−xAlxO2 thin films: Twice improved doping efficiency in V1−xWxO2

Surface Kinetics of Titanium Isopropoxide in High Vacuum Chemical Vapor Deposition

Accelerated bacterial reduction on Ag–TaN compared with Ag–ZrN and Ag–TiN surfaces

Fabrication of CMOS-compatible abrupt electronic switches based on vanadium dioxide

Tuning the porosity of zinc oxide electrodes: from dense to nanopillar films

The Biocompatibility and Anti-Biofouling Properties of Magnetic Core-Shell Fe@C NWs/AAO Nanocomposites

Combinatorial HV-CVD survey of barium triisopropyl cyclopentadienyl and titanium tetraisopropoxide for the deposition of BaTiO3

Fabrication of complex oxide microstructures by combinatorial chemical beam vapour deposition through stencil masks

Modeling chloride transport using travel time distributions at Plynlimon, Wales