MICRO-331: Microfabrication technologiesThe student will learn process techniques and applications of modern micro- and nanofabrication, as practiced in a clean room, with a focus on silicon, but also multi-material microsystems and flexibl
MSE-351: Surface analysisThe course treats the main surface analysis methods for the characterization of surfaces, interfaces and thin films. It discusses how these methods can be applied to gain specific knowledge about stru
MICRO-429: Metrology practicalsThe student will get familiar with the techniques learnt in class (MICRO-428) and will put them to practice with experiments in the laboratory. There will be a practical training for each theme covere
MICRO-530: NanotechnologyThis course gives the basics for understanding nanotechnology from an engineer's perspective: physical background, materials aspects and scaling laws, fabrication and imaging of nanoscale devices.