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This thesis reports on the successful use of low-energy metal ion implantation to fabricate compliant electrodes for miniaturized dielectric elastomer actuators (DEAs, also known as artificial muscles). DEAs are elastomeric actuators capable of large defor ...
The fracture toughness of thin metal films confined between elastic layers, a geometry prevalent in electronic packaging applications, is found to depend strongly on the metal film thickness and on residual stress. Here, a two-dimensional discrete dislocat ...
We demonstrate high-performance nanowire superconducting single photon detectors (SSPDs) on bN thin films grown at a temperature compatible with monolithic integration. NbN films ranging from 150nm to 3nm in thickness were deposited by dc magnetron sputter ...
In my thesis work I have concentrated on the growth and the in-depth analysis of high temperature superconducting thin films with the central aim to elucidate their electronic properties, predominantly by in-situ angle resolved photoemission spectroscopy ( ...
DC reactive magnetron sputtering was used for the deposition of Zr–Si–N thin films. Four series of samples have been deposited at various substrate temperatures TS: 300 K, 510 K, 710 K and 910 K. Depending on TS, different N2 partial pressures pN2 were req ...
This paper reports the impressive mechanical properties of 1 μm thick carbon-containing SiOx gas barrier coatings, characterised using the uniaxial fragmentation test. Such coatings have been found to act as excellent barriers to water vapour permeation pa ...
Erbium-doped amorphous aluminum oxide layers deposited on Si or oxidized silicon substrates are promising construction pieces for future monolytic integrated optoelectronics devices. In a novel high-vacuum chemical vapor deposition setup the alumina films ...
Electrical and optical characterization has been performed on several superconducting single photon detectors (SSPDs) consisting of meanders made of ultrathin NbN films. The NbN films, with thickness ranging from 150 nm to 3 nm, were deposited by dc magnet ...
We report on the characterization, active tuning and modeling of the first mode resonance frequency of dielectric electroactive polymer (DEAP) membranes. Unlike other resonance frequency tuning techniques, the tuning procedure presented here requires no ex ...
Institute of Electrical and Electronics Engineers2008
Monocrystalline lattice matched Er(0.6 at. %): (Gd, LU)(2)O-3 films with nearly atomically flat surfaces and thicknesses up to 3 Am have been grown on Y2O3 substrates using pulsed laser deposition. The emission cross sections were comparable with the ones ...