Energy Dispersive X-ray Spectroscopy

This lecture covers the principles and applications of Energy Dispersive X-ray Spectroscopy (EDX), a technique used for elemental analysis. It explains how X-rays are emitted from a specimen, the detection of characteristic X-ray peaks, and the quantification methods in SEM. The lecture also discusses the efficiency of X-ray generation, forbidden transitions, and the ionization process. Additionally, it explores the detection of X-rays, the functioning of silicon detectors, and the EDX spectrum analysis. The lecture concludes with a focus on the quantification process, correction methods, and the importance of high count rates for accurate measurements.