Energy Dispersive X-ray Microanalysis: Fundamentals and Applications

This lecture introduces Energy Dispersive X-ray Microanalysis (EDX), a technique for elemental analysis based on X-ray spectroscopy. It explains how EDX works by stimulating characteristic X-ray emission from a specimen using charged particles, allowing the elemental composition to be measured. The lecture covers topics such as X-ray generation, core shell ionization, efficiency of X-ray generation, and quantification methods. It also discusses the detection of X-rays using detectors like Si(Li) and the challenges in EDX, such as artifacts and quantification dilemmas. The lecture concludes with modern EDX systems, mapping techniques, and the use of Monte-Carlo simulations for EDX analysis.