Lecture

Microfabrication Techniques: Inspection and Metrology

In course

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Description

This lecture covers microfabrication techniques for inspection and metrology, including bi-morph thermal actuator fabrication, FIB basic principles, focused ion beam imaging, local cross-sectional inspection, and Z-dimension measurement. The instructor explains the processes involved in these techniques and their applications in Micro and Nanofabrication (MEMS).

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_2emm4qj5

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Ontological neighbourhood

Physics

Physical quantities: Topics in physical quantities

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