Lecture

AFM Tips and Cantilevers Fabrication

In course

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Description

This lecture covers the fabrication process of Atomic Force Microscopy (AFM) tips and cantilevers, including the microfabrication techniques used, such as bulk and surface micromachining, tip sharpening by oxidation, and the use of carbon nanotubes as probes. It also discusses the basics of thermal oxidation of silicon, the formation of molded tips for AFM, and the modification of tips using Focused Ion Beam (FIB). The instructor emphasizes the importance of the release process of cantilevers and the use of magnetic tips for Magnetic Force Microscopy (MFM).

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_kd8oofs4

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Ontological neighbourhood

Chemical engineering

Nanotechnology: Topics in nanotechnology

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