Cleanroom Basics: Introduction to Contamination Issues

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SimaPro Interface

Explores the SimaPro interface, including wizards, libraries, inventory, processes, and Agri-footprint database.

Thin Film Growth: Atoms Arrival and Adhesion

Delves into thin film growth, adhesion, crystal structure, and stresses.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Thin Film Devices: BCI

Explores the fabrication of thin film devices for BCI, covering interconnect resistance, microfabrication, encapsulation materials, and Parylene coatings.

Solid Ground Curing: Principles and Examples

Explores the Solid Ground Curing process, its consolidation mechanism, advantages, and applications in additive manufacturing.

Treatment and Recovery of Water and Waste

Explores heat treatments, heavy metal recovery, and effluent treatment in waste incineration processes.

Micro/Nanomechanical Devices: Fabrication Techniques

Explores the fabrication of micro/nanomechanical devices, covering release, selectivity, stiction, deposition, etching, lithography, and growth techniques.

Microfabrication Techniques: Tips and Sensors

Explores microfabrication techniques for nanotips and sensors, contact modes in AFM, capillary forces, and integrated sensors and actuators.

Microfabrication Techniques: Inspection and Metrology

Explores microfabrication techniques for inspection and metrology in MEMS applications.

Technologies: BioMEMS Overview

Covers BioMEMS technologies, materials, processes, and PDMS chemistry.