Covers microfabrication technologies in a modern cleanroom environment, including cleanroom fundamentals, MEMS success stories, and hands-on activities.
Explores cleanroom basics and contamination issues in microfabrication processes, emphasizing the impact of contaminants on device performance and reliability.
Explores the design and fabrication of Brain-Computer Interfaces using silicon-based technologies and flexible materials, emphasizing key fabrication techniques and material properties.
Explores lithography in microfabrication technologies, covering thin film deposition, print resolution, process flow, and limitations imposed by diffraction.