Lecture
Lithography: Tools and Techniques
In course
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Description
This lecture covers the principles and tools used in lithography for micro and nanofabrication, including UV lithography, alignment and exposure tools, contact and proximity exposure, exposure wavelengths and light sources, projection lithography, resolution enhancement techniques, phase shift masks, and immersion lithography.
In MOOCs (3)
Micro and Nanofabrication (MEMS)
Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.
Microstructure Fabrication Technologies I
Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.
Micro and Nanofabrication (MEMS)
Learn the fundamentals of microfabrication and nanofabrication by using the most effective techniques in a cleanroom environment.
Instructors (2)
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Official source
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Ontological neighbourhood
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