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Lecture
Stress in Thin Films: Film Growth and Microfabrication
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Chemical Vapour Deposition: Thin Films & Oxidation
Explores Chemical Vapour Deposition, thermal oxidation, and a micro-actuator case study in micro and nanofabrication.
Chemical Vapor Deposition: Processes and Applications
Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.
