Stress in Thin Films: Film Growth and Microfabrication
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Covers wet etching of sacrificial layers in micro and nanofabrication, including challenges and solutions for microstructure deformation and stress diagnosis.
Explores surface profiling techniques like white light interferometry and laser beam profiling, emphasizing their non-contact nature and high resolution.
Explores various Chemical Vapor Deposition processes, including APCVD, SACVD, LPCVD, UHV/CVD, PECVD, and MOCVD, focusing on film growth and plasma effects.
