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Electrostatic MEMS: Scaling & Actuation
This lecture covers the Paschen curve, which relates breakdown voltage to pressure and distance in air, explaining the lower breakdown field in air and the maximum voltage applicable in air. It delves into the breakdown voltage at 1 atmosphere, the influence of the electric field on the effective spring constant, and the comparison of energy densities between different actuation principles. The lecture also explores the parallel plates electrostatic actuator, discussing the equilibrium position, effective spring constant, and pull-in phenomena. It concludes with methods to stabilize electrostatic actuators to increase control range and prevent pull-in.