Electrostatic MEMS: Scaling & Actuation

In course

Description

This lecture covers the Paschen curve, which relates breakdown voltage to pressure and distance in air, explaining the lower breakdown field in air and the maximum voltage applicable in air. It delves into the breakdown voltage at 1 atmosphere, the influence of the electric field on the effective spring constant, and the comparison of energy densities between different actuation principles. The lecture also explores the parallel plates electrostatic actuator, discussing the equilibrium position, effective spring constant, and pull-in phenomena. It concludes with methods to stabilize electrostatic actuators to increase control range and prevent pull-in.

Instructors (2)

Official source

https://mediaspace.epfl.ch/media/0_f0uigyoh

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Related lectures (15)

Related concepts (26)

Electric potential

The electric potential (also called the electric field potential, potential drop, the electrostatic potential) is defined as the amount of work energy needed per unit of electric charge to move this charge from a reference point to the specific point in an electric field. More precisely, it is the energy per unit charge for a test charge that is so small that the disturbance of the field under consideration is negligible.

Electromagnetic field

An electromagnetic field (also EM field or EMF) is a classical (i.e. non-quantum) field produced by moving electric charges. It is the field described by classical electrodynamics (a classical field theory) and is the classical counterpart to the quantized electromagnetic field tensor in quantum electrodynamics (a quantum field theory). The electromagnetic field propagates at the speed of light (in fact, this field can be identified as light) and interacts with charges and currents.

Electrostatic discharge

Electrostatic discharge (ESD) is a sudden and momentary flow of electric current between two electrically charged objects caused by contact, an electrical short or dielectric breakdown. A buildup of static electricity can be caused by tribocharging or by electrostatic induction. The ESD occurs when differently-charged objects are brought close together or when the dielectric between them breaks down, often creating a visible spark.

Electrostatic generator

An electrostatic generator, or electrostatic machine, is an electrical generator that produces static electricity, or electricity at high voltage and low continuous current. The knowledge of static electricity dates back to the earliest civilizations, but for millennia it remained merely an interesting and mystifying phenomenon, without a theory to explain its behavior and often confused with magnetism.

MEMS

MEMS (Microelectromechanical systems) is the technology of microscopic devices incorporating both electronic and moving parts. MEMS are made up of components between 1 and 100 micrometres in size (i.e., 0.001 to 0.1 mm), and MEMS devices generally range in size from 20 micrometres to a millimetre (i.e., 0.02 to 1.0 mm), although components arranged in arrays (e.g., digital micromirror devices) can be more than 1000 mm2.