Mask Fabrication Process

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Related lectures (32)

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Advanced Nanomanufacturing: Lithography & Self-Assembly

Delves into advanced nanomanufacturing techniques, including lithography and block copolymer self-assembly for precise device fabrication.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Fabrication Technology

Covers the process integration in semiconductor fabrication, including twin-well process, isolation methods, threshold voltage adjustment, and silicide formation.

Laser Cutting and Additive Manufacturing

Explores laser cutting, additive manufacturing, polymerization mechanisms, and 3D metal printing processes.

Micro and Nanofabrication: Basics and Techniques

Covers the basics of micro and nano fabrication techniques for MEMS devices.

Lithography: Mask and Laser Writing

Explores photomask creation, exposure methods, direct laser writing, resolution, and resist development in MEMS applications.

Microfabrication Technologies

Covers microfabrication technologies in a modern cleanroom environment, including cleanroom fundamentals, MEMS success stories, and hands-on activities.

Lithography: Fabrication Extended

Explores lithography techniques in nanofabrication, focusing on EBL and NIL processes.

Thermo-mechanical Micro-actuator: Case Study

Explores the design and fabrication of a bi-morph micro-actuator and its thermo-mechanical characterization through DC and AC current applications.

Projection Imaging and Physics of Materials

Explores mask projection systems, laser micro-processing, submicron structures, Gaussian beams, waveguiding principles, and light-materials interaction.