Lecture

Micro and Nanofabrication: Basics and Techniques

In course

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Description

This lecture introduces the fundamentals of micro and nano fabrication techniques, focusing on their application in MEMS devices. The instructors explain the processes carried out in a clean room environment, illustrating how these techniques enable the mass production of devices used in everyday life.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_t10hth2u

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Ontological neighbourhood

Electrical engineering

Electromechanics: Microelectromechanical systems

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