Lecture

Lithography: Alternative Patterning Methods

In course

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Description

This lecture covers alternative lithography methods such as nanoimprint lithography, soft-lithography, and stencil lithography. It explains the imprint stack preparation, imprinting process, residual layer etch, and replication methods. It also discusses the fabrication of nanowires using stencil lithography and details of stencil lithography on exotic surfaces.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_jf3doufw

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Ontological neighbourhood

Chemical engineering

Nanotechnology: Topics in nanotechnology

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