Plasma Generation and Ion Sheath in Etching

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Covers the process of etching using wet and dry techniques, explaining definitions, steps, examples, challenges, and solutions.

Plasma Physics: Sheaths and Etching

Explores plasma formation, sheath creation, and plasma etching applications for integrated circuit manufacturing.

Micro and Nanofabrication

Covers micro and nanofabrication processes, including plasma etching and dry etching techniques.

Glass Microfabrication by Wet Etching

Explores glass microfabrication using wet etching with hydrofluoric acid, covering etching mechanisms, additives impact, and surface effects.

Plasma Heating: Neutral Beams

Explores the limitations of ohmic heating in plasma and the advantages and drawbacks of neutral beam injection for additional plasma heating.

Dry Etching: Techniques and Equipment

Explores various dry etching techniques for silicon and the equipment used in the process, including RF plasma sources and HF vapor phase etchers.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.

Dry Etching Techniques

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Dry Etching Techniques

Explores dry etching techniques for different materials, including continuous, pulsed, cryogenic processes, and isotropic etching using SF6.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, AC plasma processing, and ozone production.