PVD 3: Sputtering and Paschen's Law

In course

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Description

This lecture covers the spatial zones in DC glow discharge, including the negative glow, anode glow, and dark spaces, as well as the concepts of Paschen's law related to breakdown voltage in different gases and chamber pressures.

In MOOCs (3)

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_s16iea6o

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Ontological neighbourhood

Physics

Electromagnetism: Topics in electromagnetism

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