Lecture

Design of MEMS Mirrors with Serpentine Springs

In course

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Description

This lecture covers the design and challenges of folded (serpentine) springs in MEMS devices, focusing on their use in bending and torsion applications. The instructor presents examples of MEMS mirrors for optical cross-connect, discussing the engineering of single-crystal silicon springs for shock tolerance and the failure modes observed at different G-forces.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_wnwq197a

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