Deep Reactive Ion Etching: High Aspect Ratio Structures

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Micro and Nanofabrication: Chemical Reactions and Etching Processes

Explores chemical reactions and etching processes in micro and nanofabrication, including Si etching and the formation of porous Si.

Wet Etching: Crystal Structure and Anisotropy

Explores silicon crystal structure, anisotropy in etching rates, etch mechanisms, and different etching baths in micro and nanofabrication.

Dry Etching Techniques

Explores dry etching techniques in semiconductor processing, from barrel reactors to modern plasma sources like ICP and ECR.

Dry etching: fundamentals and applications

Explores the fundamentals of dry etching in a gas plasma and provides simple rules for choosing dry etchants.

Wet Etching: Glass and Silicon

Explores the wet etching process of glass and silicon using HF-based solutions and cleanroom processes for HF and BHF etchants.

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Plasma Physics: Sheaths and Etching

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Ion Beam Etching

Introduces ion beam etchers, combining physical sputtering with chemical activity.

Industrial Plasmas: Sheath Formation and Plasma Etching

Explores sheath formation, plasma etching, ion velocity, and energy in industrial plasmas, emphasizing their significance for modern electronics manufacturing.