Lecture

Principle of SIMS

In course

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Description

This lecture covers the principle of Secondary Ion Mass Spectrometry (SIMS), explaining how a surface is sputtered with a primary ion beam to analyze secondary ions with a mass spectrometer. Topics include mass spectrum, depth profile, mass interference, modes of operation, sputtering yield, ionization yield, and examples of SIMS applications.

Instructors (2)

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Official source

https://mediaspace.epfl.ch/media/0_zmmf82qa

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