Person

Philippe Langlet

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Related publications (5)

Please note that this is not a complete list of this person’s publications. It includes only semantically relevant works. For a full list, please refer to Infoscience.

All-stencil transistor fabrication on 3D silicon substrates

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Andreea Veronica Savu, Cyrille Hibert, Cristina Martin Olmos, Philippe Langlet, Oscar Vazquez Mena, Peter Vettiger, Katrin Sidler Arnet

The standard lithographic techniques to fabricate electronic components involve the use of polymers, baking steps and chemicals. This typically restricts their application to flat substrates made up of standard materials. Stencil lithography has been propo ...
Iop Publishing Ltd2012

Localized Ion Implantation Through Micro/Nanostencil Masks

Jürgen Brugger, Luis Guillermo Villanueva Torrijo, Cristina Martin Olmos, Philippe Langlet, Oscar Vazquez Mena

A method is presented that allows the definition of micrometer- and submicrometer-sized implanted structures in silicon without using photoresist patterning. The process is based on the use of stencils as masks in a conventional ion implanter, and is tested ...
Institute of Electrical and Electronics Engineers2011
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